INSIDE 硬塞 AIJun 4, 2026, 7:20 AMClaireimportant 72

TSMC Buys High-NA EUV but Delays Mass Production, Raises Capex to $56B

Original: 台積電 High-NA EUV 已購入尚未量產、資本支出上修 560 億美元,魏哲家:社會責任仍須加大

TSMC has bought High-NA EUV tools but delays mass production while raising capex to $56 billion.

At TSMC’s shareholder meeting, the company said it has purchased High-NA EUV equipment but has not yet moved it into mass production due to high costs. TSMC also raised capital expenditure to $56 billion, signaling continued heavy investment in advanced manufacturing capacity. CEO C.C. Wei also pledged more than 30% annual growth in dividends and employee bonuses, while saying the company must expand its social responsibility efforts.

At its shareholders' meeting, TSMC provided explanations on advanced-process investment, capital expenditure, returns to shareholders and employees, and corporate social responsibility. The most closely watched item was the progress of High-NA EUV: the company has already purchased the relevant equipment, but has not yet put it into mass production. The article notes that the main reason is the high cost, so TSMC has chosen to delay introducing it into mass production. This shows that even the world's most important advanced foundry must still weigh equipment cost, mass-production efficiency, and actual commercial benefit when introducing next-generation lithography equipment, rather than simply pursuing the earliest adoption of a technology node.

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